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Impact of finite laser bandwidth on the critical dimension of L/S structures

Date

2008
Journal article
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dc.contributor.authorDe Bisschop, Peter
dc.contributor.authorLalovic, Ivan
dc.contributor.authorTrintchouk, Fedor
dc.contributor.imecauthorDe Bisschop, Peter
dc.date.accessioned2021-10-17T06:43:03Z
dc.date.available2021-10-17T06:43:03Z
dc.date.embargo9999-12-31
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13594
dc.source.beginpage33001
dc.source.issue3
dc.source.journalJournal of Micro/Nanolithography, MEMS, and MOEMS
dc.source.volume7
dc.title

Impact of finite laser bandwidth on the critical dimension of L/S structures

dc.typeJournal article
dspace.entity.typePublication
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