Effect of laser bandwidth tuning on line/space and contact printing at 1.35NA

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Authors
Van Look, Lieve; Bekaert, Joost; Vandenberghe, Geert; Lalovic, Ivan; Farrar, Nigel
Conference
5th International Symposium on Immersion Lithography Extensions
Title
Effect of laser bandwidth tuning on line/space and contact printing at 1.35NA
Publication type
Proceedings paper
Embargo date
9999-12-31
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