Publication:

Effect of laser bandwidth tuning on line/space and contact printing at 1.35NA

Date

2008
Proceedings Paper
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dc.contributor.authorVan Look, Lieve
dc.contributor.authorBekaert, Joost
dc.contributor.authorVandenberghe, Geert
dc.contributor.authorLalovic, Ivan
dc.contributor.authorFarrar, Nigel
dc.contributor.imecauthorVan Look, Lieve
dc.contributor.imecauthorBekaert, Joost
dc.contributor.imecauthorVandenberghe, Geert
dc.contributor.orcidimecBekaert, Joost::0000-0003-3075-3479
dc.date.accessioned2021-10-17T11:58:13Z
dc.date.available2021-10-17T11:58:13Z
dc.date.embargo9999-12-31
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14668
dc.source.conference5th International Symposium on Immersion Lithography Extensions
dc.source.conferencedate22/09/2008
dc.source.conferencelocationDen Haag Nederland
dc.title

Effect of laser bandwidth tuning on line/space and contact printing at 1.35NA

dc.typeProceedings paper
dspace.entity.typePublication
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