Browsing by author "Wang, C."
Now showing items 1-2 of 2
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Hydroquinone oriented growth control to achieve high-quality copper coating at high rate for electronics interconnection
Zheng, Li; Wang, C.; Cai, D.; Huang, Y.; Adi, K.; Hong, Y.; Chen, Y.; Zhou, G.; Armini, Silvia; De Gendt, Stefan; Wang, Shouxu; He, Wei (2020) -
Impact of Hf-precursor choice on scaling and performance of high-k gate dielectrics
Maes, Jan; Fedorenko, Yanina; Delabie, Annelies; Ragnarsson, Lars-Ake; Swerts, Johan; Nyns, Laura; Van Elshocht, Sven; Wang, C.; Wilk, G. (2007)