Browsing by author "Yamada, N."

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Integration of PVD ruthenium as a pMOS metal gate in scaled planar devices: workfunction and electrical performance on HfO2

Deweerd, Wim; Schram, Tom; Van Hoornick, Nausikaa; Witters, Thomas; Lisoni, Judit; Rohr, Erika; De Gendt, Stefan; Heyns, Marc; Schaekers, Marc; Richard, Olivier; Wickramanayaka, Sunil; Yamada, N.; Brunco, David (2005)
Introducing novel metal gate materials for decananometer CMOS in the agile fab: a case study

Deweerd, Wim; Schram, Tom; Catana, Gabriela; Shamiryan, Denis; Garaud, Sylvain; Hellin, David; De Gendt, Stefan; Heyns, Marc; Wickramanayaka, S.; Kawashima, T.; Yamada, N.; Vertommen, Johan; Lander, Rob (2004)