Publication:

Introducing novel metal gate materials for decananometer CMOS in the agile fab: a case study

Date

2004
Proceedings Paper
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Author(s)

Deweerd, Wim
;
Schram, Tom  
;
Catana, Gabriela
;
Shamiryan, Denis
;
Garaud, Sylvain
;
Hellin, David  
;
De Gendt, Stefan  
;
Heyns, Marc  
;
Wickramanayaka, S.
;
Kawashima, T.
;
Yamada, N.
;
Vertommen, Johan
;
Lander, Rob

Journal

Abstract

Description

Statistics

Views

1982 since deposited on 2021-10-15
1last month
Acq. date: 2026-02-25

Citations

Statistics

Views

1982 since deposited on 2021-10-15
1last month
Acq. date: 2026-02-25

Citations