Publication:

Introducing novel metal gate materials for decananometer CMOS in the agile fab: a case study

Date

2004

Proceedings Paper

Simple item page Full metadata Statistics

Author(s)

;

;

Catana, Gabriela

;

Shamiryan, Denis

;

Garaud, Sylvain

;

;

De Gendt, Stefan

;

;

Wickramanayaka, S.

;

;

;

Vertommen, Johan

;

Statistics

1982 since deposited on 2021-10-15

Acq. date: 2026-03-17