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Introducing novel metal gate materials for decananometer CMOS in the agile fab: a case study
Publication:
Introducing novel metal gate materials for decananometer CMOS in the agile fab: a case study
Date
2004
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Deweerd, Wim
;
Schram, Tom
;
Catana, Gabriela
;
Shamiryan, Denis
;
Garaud, Sylvain
;
Hellin, David
;
De Gendt, Stefan
;
Heyns, Marc
;
Wickramanayaka, S.
;
Kawashima, T.
;
Yamada, N.
;
Vertommen, Johan
;
Lander, Rob
Journal
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1976
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations
Metrics
Views
1976
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations