Browsing by author "Voronina,"

Now showing items 1-1 of 1

Area-selective Ru-ALD by amorphous carbon modification using H radicals

Zyulkov, Ivan; Voronina,; Voloshin,; Chan, BT; Manchelevich,; Rachimova,; Armini, Silvia; De Gendt, Stefan (2019)