Area-selective Ru-ALD by amorphous carbon modification using H radicals

Thumbnail
Metadata
Show full item record
Authors
Zyulkov, Ivan; Voronina,; Voloshin,; Chan, BT; Manchelevich,; Rachimova,; Armini, Silvia; De Gendt, Stefan
Conference
ASD workshop
Title
Area-selective Ru-ALD by amorphous carbon modification using H radicals
Publication type
Meeting abstract
Collections