Browsing by author "Roelofs, Christian"

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Co-optimizatin of RegC and TWINSCANTM corrections to improve the intra-field on-product overlay performance

Gorhad, Kujan; Sharon, Ofir; Dmitriev, Vladimir; Cohen, Avi; van Haren, Richard; Roelofs, Christian; Cekli, H.E.; Gallagher, Emily; Leray, Philippe; Beyer, Dirk; Trautsch, Thomas; Steinert, Steffen (2016)
Off-line mask-to-mask registration characterization

van Haren, Richard; Steinert, Steffen; Roelofs, Christian; Mouraille, Orion; D'have, Koen; van Dijk, Leon; Beyer, Dirk (2017)