Browsing by author "Yamakawa, T."

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A high performance electrostatic MEMS vibration energy harvester with corrugated inorganic SiO2-Si3N4 electret

Renaud, Michael; Altena, Geert; Goedbloed, Martijn; de Nooijer, Christine; Matova, Svetla; Naito, Y.; Yamakawa, T.; Takeuchi, H.; Onishi, K.; van Schaijk, Rob (2013)
Torsional mode MEMS resonator using thin film vacuum package

Onishi, K.; Naito, Yasuyuki; Yamakawa, T.; Nakamura, K.; Helin, Philippe; De Coster, Jeroen; Haspeslagh, Luc; Tilmans, Harrie (2012)