Publication:
A high performance electrostatic MEMS vibration energy harvester with corrugated inorganic SiO2-Si3N4 electret
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1892 since deposited on 2021-10-21
2last month
Acq. date: 2026-09-12
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Views
1892 since deposited on 2021-10-21
2last month
Acq. date: 2026-09-12
Citations