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A high performance electrostatic MEMS vibration energy harvester with corrugated inorganic SiO2-Si3N4 electret
Publication:
A high performance electrostatic MEMS vibration energy harvester with corrugated inorganic SiO2-Si3N4 electret
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Date
2013
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Renaud, Michael
;
Altena, Geert
;
Goedbloed, Martijn
;
de Nooijer, Christine
;
Matova, Svetla
;
Naito, Y.
;
Yamakawa, T.
;
Takeuchi, H.
;
Onishi, K.
;
van Schaijk, Rob
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1886
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1886
since deposited on 2021-10-21
2
last month
Acq. date: 2025-12-10
Citations