Authors

Renaud, Michael; Altena, Geert; Goedbloed, Martijn; de Nooijer, Christine; Matova, Svetla; Naito, Y.; Yamakawa, T.; Takeuchi, H.; Onishi, K.; van Schaijk, Rob

Conference

Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems

Title

A high performance electrostatic MEMS vibration energy harvester with corrugated inorganic SiO2-Si3N4 electret

Publication type

Proceedings paper

Embargo date

9999-12-31