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Publication:

A high performance electrostatic MEMS vibration energy harvester with corrugated inorganic SiO2-Si3N4 electret

Date

2013
Proceedings Paper
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29199.pdf 413.49 KB

Author(s)

Renaud, Michael
;
Altena, Geert
;
Goedbloed, Martijn
;
de Nooijer, Christine  
;
Matova, Svetla
;
Naito, Y.
;
Yamakawa, T.
;
Takeuchi, H.
;
Onishi, K.
;
van Schaijk, Rob

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Abstract

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1886 since deposited on 2021-10-21
Acq. date: 2026-07-27

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1886 since deposited on 2021-10-21
Acq. date: 2026-07-27

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