Browsing by author "Light, Scott"

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157-nm photoresist process optimization for a full-field scanner

Light, Scott; Stepanenko, Nickolay; Gronheid, Roel; Van Roey, Frieda; Van Den Heuvel, Dieter; Goethals, Mieke (2004-03)
Status and critical challenges for 157nm lithography

Ronse, Kurt; De Bisschop, Peter; Goethals, Mieke; Hermans, Jan; Jonckheere, Rik; Light, Scott; Okoroanyanwu, Uzo; Watso, Robert; McAfferty, D.; Ivaldi, J.; Oneil, T.; Sewell, H. (2004)