Browsing by author "Slachter, Bram"

Now showing items 1-2 of 2

    • Impact of local variability on defect-aware process windows 

      Maslow, Mark John; Yaegashi, Hidetami; Frommhold, Andreas; Schiffelers, Guido; Wahlisch, Felix; Rispens, Gijsbert; Slachter, Bram; Yoshida, Keisuke; Hara, Arisa; Oikawa, Noriaki; Pathak, Abhinav; Cerbu, Dorin; Hendrickx, Eric; Bekaert, Joost (2019)

    • Stitching for High NA: zooming in on CDU budget 

      Davydova, Natalia; van Look, Lieve; Weldeslassie, Ataklti; Wiaux, Vincent; Huddleston, Laura; Slachter, Bram; Pellens, Nick; Timmermans, Frank; Wittebrood, Friso; van Setten, Eelco; Wilson, Daniel (2023)