Publication:

Impact of local variability on defect-aware process windows

Date

2019

Proceedings Paper

Simple item page Full metadata Statistics

Author(s)

Maslow, Mark John

;

Yaegashi, Hidetami

;

Frommhold, Andreas

;

Schiffelers, Guido

;

Wahlisch, Felix

;

Rispens, Gijsbert

;

;

Yoshida, Keisuke

;

;

Oikawa, Noriaki

;

Pathak, Abhinav

;

;

Hendrickx, Eric

;

Metrics

1925 since deposited on 2021-10-27

1last month

Acq. date: 2026-01-07