Impact of local variability on defect-aware process windows

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Author(s)

Maslow, Mark John

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Yaegashi, Hidetami

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Frommhold, Andreas

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Schiffelers, Guido

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Wahlisch, Felix

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Rispens, Gijsbert

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;

Yoshida, Keisuke

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;

Oikawa, Noriaki

;

Pathak, Abhinav

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;

Hendrickx, Eric

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Metrics

1922 since deposited on 2021-10-27

Acq. date: 2025-10-23