Publication:

Impact of local variability on defect-aware process windows

Date

2019

Proceedings Paper

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Author(s)

Maslow, Mark John

;

Yaegashi, Hidetami

;

Frommhold, Andreas

;

Schiffelers, Guido

;

Wahlisch, Felix

;

Rispens, Gijsbert

;

;

Yoshida, Keisuke

;

;

Oikawa, Noriaki

;

Pathak, Abhinav

;

;

Hendrickx, Eric

;

Statistics

1951 since deposited on 2021-10-27

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Acq. date: 2026-10-09