Browsing by author "Rollins, Gregoy"

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Double-patterning interactions with wafer processing, optical proximity correction, and physical design flows

Lucas, Kevin; Cork, Christopher M.; Miloslavsky, Alexander; Luk-Pat, Gerard; Barnes, Levi D.; Hapli, John; Lewellen, John; Rollins, Gregoy; Wiaux, Vincent; Verhaegen, Staf (2009)