Authors
Lucas, Kevin;
Cork, Christopher M.;
Miloslavsky, Alexander;
Luk-Pat, Gerard;
Barnes, Levi D.;
Hapli, John;
Lewellen, John;
Rollins, Gregoy;
Wiaux, Vincent;
Verhaegen, Staf
Issue
3
Journal
Journal of Micro/Nanolithography, MEMS, and MOEMS
Volume
8
Title
Double-patterning interactions with wafer processing, optical proximity correction, and physical design flows
Publication type
Journal article
Embargo date
9999-12-31
