Publication:

Double-patterning interactions with wafer processing, optical proximity correction, and physical design flows

Date

2009

Journal article

Simple item page Full metadata Statistics

Files

17430.pdf 2.08 MB

Author(s)

;

Cork, Christopher M.

;

Miloslavsky, Alexander

;

Luk-Pat, Gerard

;

Barnes, Levi D.

;

;

;

Rollins, Gregoy

;

;

Verhaegen, Staf

Journal

Journal of Micro/Nanolithography, MEMS, and MOEMS

Statistics

1948 since deposited on 2021-10-18

Acq. date: 2026-02-26