Browsing by author "Tanaku, Shuji"
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A study of blister formation in ALD Al2O3 grown on silicon
Vermang, Bart; Goverde, Hans; Simons, Veerle; De Wolf, Ingrid; Meersschaut, Johan; Tanaku, Shuji; John, Joachim; Poortmans, Jef; Mertens, Robert (2012)