Browsing by author "Muelders, Thomas"
Now showing items 1-3 of 3
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Calibration of physical resist models for simulation of extreme ultraviolet lithography
Klostermann, Ulrich K.; Muelders, Thomas; Schmoeller, Thomas; Lorusso, Gian; Hendrickx, Eric (2011) -
Impact of mask three dimensional effects on resist-model calibration
De Bisschop, Peter; Muelders, Thomas; Klostermann, Ulrich; Schmoeller, Thomas; Biafore, John; Robertson, Stewart A.; Smith, Mark (2009) -
Physical resist models and their calibration: their readiness for accurate EUV lithography simulation
Klostermann, Ulrich K.; Muelders, Thomas; Schmoeller, Thiomas; Lorusso, Gian; Hendrickx, Eric (2010)