Browsing by author "Lefaucheux, Phillipe"

Now showing items 1-1 of 1

Damage-free plasma etching of porous organo-silicate low-k using micro-capillary condensation above -50° C

Chanson, Romain; Zhang, Liping; Naumove, Sergei; Mankelevich, Yu.; Tillocher, Thomas; Lefaucheux, Phillipe; Dussart, Remi; De Gendt, Stefan; de Marneffe, Jean-Francois (2018)