Publication:
Damage-free plasma etching of porous organo-silicate low-k using micro-capillary condensation above -50° C
Date
Loading...
Files
Journal
Abstract
Description
Metrics
Views
1958 since deposited on 2021-10-25
1last month
Acq. date: 2026-01-09
Citations
Metrics
Views
1958 since deposited on 2021-10-25
1last month
Acq. date: 2026-01-09
Citations