Authors

Chanson, Romain; Zhang, Liping; Naumove, Sergei; Mankelevich, Yu.; Tillocher, Thomas; Lefaucheux, Phillipe; Dussart, Remi; De Gendt, Stefan; de Marneffe, Jean-Francois

ISSN

2045-2322

Journal

Scientific Reports

Volume

8

Title

Damage-free plasma etching of porous organo-silicate low-k using micro-capillary condensation above -50° C

Publication type

Journal article

Embargo date

9999-12-31