Publication:
Damage-free plasma etching of porous organo-silicate low-k using micro-capillary condensation above -50° C
Date
Loading...
Files
Journal
Abstract
Description
Metrics
Views
1954 since deposited on 2021-10-25
Acq. date: 2025-10-24
Citations
Metrics
Views
1954 since deposited on 2021-10-25
Acq. date: 2025-10-24
Citations