Browsing by author "Deutz, Alex"

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    • Lifetime test on EUV photomask with EBL2 

      Wu, Chien-ching; Bender, Markus; Jonckheere, Rik; Scholze, Frank; Bekman, Herman; van Putten, Michel; de Zanger, Rory; Ebeling, Rob; Westerhout, Jeroen; Nicolai, Kyri; van Veldhoven, Jacqueline; de Rooij-Lohmann, Veronique; Kievit, Olaf; Deutz, Alex (2019-05)