Browsing by author "Zahn, D.R.T."

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Ellipsometric study of the change in the porosity of silica xerogels after chemical modification of the surface with hexamethyldisilazane

Himcinschi, C.; Friedrich, M.; Frühauf, S.; Streiter, I.; Schulz, S.E.; Gessner, T.; Baklanov, Mikhaïl; Moguilnikov, Konstantin; Zahn, D.R.T. (2002)
Scaling down thickness of ULK materials for 65 node and below and its efect on electrical performance

Fruhauf, S.; Himcinschi, C.; Rennau, M.; Schulze, K.; Schulz, S.E.; Friedrich, M.; Gessner, T.; Zahn, D.R.T.; Le, Quoc Toan; Caluwaerts, Rudy (2005)