Browsing by author "Purushothaman, Muthukrishnan"
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Acidic cleaning solutions for post InGaAs CMP cleaning
Park, Jin-Goo; Purushothaman, Muthukrishnan; Lee, Jung-Hwan; Choi, In-chan; Kim, Hyun-Tae; Teugels, Lieve; Kim, Tae-Gon (2018-04) -
Development of post InGaAs CMP cleaning process for sub 10 nm device application
Purushothaman, Muthukrishnan; Choi, In-chan; Kim, Hyun-Tae; Teugels, Lieve; Kim, Tae-Gon; Park, Jin-Goo (2017-10) -
Development of post InGaAs CMP cleaning process for sub 10nm device application
Purushothaman, Muthukrishnan; Choi, In-Chan; Kim, Hyun-Tae; Teugels, Lieve; Kim, Tae-Gon; Park, Jin-Goo (2017-10)