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Acidic cleaning solutions for post InGaAs CMP cleaning
Publication:
Acidic cleaning solutions for post InGaAs CMP cleaning
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Date
2018
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Park, Jin-Goo
;
Purushothaman, Muthukrishnan
;
Lee, Jung-Hwan
;
Choi, In-chan
;
Kim, Hyun-Tae
;
Teugels, Lieve
;
Kim, Tae-Gon
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1891
since deposited on 2021-10-26
Acq. date: 2026-07-17
Citations
Statistics
Views
1891
since deposited on 2021-10-26
Acq. date: 2026-07-17
Citations