Browsing by author "Granneman, E."
Now showing items 1-4 of 4
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A new HF vapor process for native oxide removal, suited for cluster applications
Storm, Arjen; Sprey, Hessel; Maes, Jan; Granneman, E.; De Blank, Rene; Röhr, Erika; Caymax, Matty; Heyns, Marc (1999) -
Electrical demonstration of thermally stable Ni silicides on Si1-xCx epitaxial layers
Machkaoutsan, Vladimir; Verheyen, Peter; Bauer, M.; Zhang, Y.; Koelling, Sebastian; Franquet, Alexis; Vanormelingen, Koen; Loo, Roger; Kim, C.S.; Lauwers, Anne; Horiguchi, Naoto; Kerner, Christoph; Hoffmann, Thomas; Granneman, E.; Vandervorst, Wilfried; Absil, Philippe; Thomas, S.G. (2010) -
Intra-die temperature non uniformity related to front side emissivity depandence during rapid thermal annealing
Laviron, C.; Lindsay, Richard; Michallet, A.; Halimaoui, A.; Granneman, E. (2003) -
Thermal stability of Pt and C-doped NiSi films
Machkaoutsan, Vladimir; Pagès, X.; Bauer, M.; Thomas, S.; Mertens, Sofie; Verheyden, K.; Vanormelingen, Koen; Granneman, E. (2007)