Browsing by author "Shirakawa, H"
Now showing items 1-2 of 2
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Applicable solvent photoresist strip process for high-k/metal gate
Wada, M; Takahashi, H; Snow, J; Vos, Rita; Mertens, PW; Shirakawa, H (2010) -
Cleaning and surface preparation for SiGe and Ge channel device
Wada, M; Takahashi, H; Snow, J; Vos, Rita; Mertens, Paul; Shirakawa, H (2010)