Cleaning and surface preparation for SiGe and Ge channel device

Thumbnail
Metadata
Show full item record
Authors
Wada, M; Takahashi, H; Snow, J; Vos, Rita; Mertens, Paul; Shirakawa, H
Conference
10th International Symposium on Ultra-Clean Processing of Semiconductor Devices - UCPSS
Title
Cleaning and surface preparation for SiGe and Ge channel device
Publication type
Meeting abstract
Collections