Browsing by author "Ignatova, V.A."
Now showing items 1-4 of 4
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Depth profiling of ZrO2/SiO2/Si stacks - a TOF-SIMS and computer simulation study
Ignatova, V.A.; Conard, Thierry; Moller, W.; Vandervorst, Wilfried; Gijbels, R. (2004) -
Depth profiling of ZrO2/SiO2/Si stacks-a TOF-SIMS and computer simulation study
Ignatova, V.A.; Conard, Thierry; Möller, W.; Vandervorst, Wilfried; Gijbels, R. (2004-05) -
Depth profiling of ZrO2/SiO2/Si stacks-TOF-SIMS and computer simulation study
Ignatova, V.A.; Conard, Thierry; Moeller, W.; Vandervorst, Wilfried; Gijbels, R. (2003) -
Interpretation of TOF-SIMS depth profiles from ultrashallow high-k dielectric stacks assisted by hybrid collisional computer simulation
Ignatova, V.A.; Möller, W.; Conard, Thierry; Vandervorst, Wilfried; Gijbels, R. (2005-02)