Browsing by author "Cecchet, Francesca"
Now showing items 1-2 of 2
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Sealing of porous low-k dielectric materials: UV-O3 oxidised CVD silicon oxycarbide materials
Whelan, Caroline; Cecchet, Francesca; Le, Quoc Toan; Satta, Alessandra; Pireaux, Jean-Jaques; Maex, Karen; Rudolf, Petra (2002) -
Sealing of porous low-k dielectrics: an ellipsometric porosimetry study of UV-O3 oxidized SiOxCy films
Whelan, Caroline; Le, Quoc Toan; Cecchet, Francesca; Satta, Alessandra; Pireaux, Jean-Jacques; Rudolf, Petra; Maex, Karen (2004)