Authors

Whelan, Caroline; Le, Quoc Toan; Cecchet, Francesca; Satta, Alessandra; Pireaux, Jean-Jacques; Rudolf, Petra; Maex, Karen

Issue

2

Journal

Electrochemical and Solid-State Letters

Volume

7

Title

Sealing of porous low-k dielectrics: an ellipsometric porosimetry study of UV-O3 oxidized SiOxCy films

Publication type

Journal article