Browsing by author "Lim, Chang-Moon"

Now showing items 1-2 of 2

    • EUV contact holes and pillars pattering 

      Park, Sarohan; De Simone, Danilo; Tao, Zheng; Vandenberghe, Geert; Hyun, Yoonsuk; Kim, Seo-Min; Lim, Chang-Moon (2015)

    • Staggered pillar patterning using 0.33NA EUV lithography 

      De Simone, Danilo; Blanc, Romuald; Van de Kerkhove, Jeroen; Tamaddon, Amir-Hossein; Fallica, Roberto; Van Look, Lieve; Rassoul, Nouredine; Lazzarino, Frederic; Vandenbroeck, Nadia; Vanelderen, Pieter; Lorusso, Gian; Van Roey, Frieda; Charley, Anne-Laure; Vandenberghe, Geert; Ronse, Kurt; Lee, Kilyoung; Lee, Junghyung; Park, Sarohan; Lim, Chang-Moon; Park, Chan-Ha (2019)