Browsing by author "Adam, Kostas"
Now showing items 1-3 of 3
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Effective use of aerial image metrology for calibration of OPC models
Chen, Ao; Foong, Yee Mei; Thaler, Thomas; Buttgereit, Ute; Chung, Angeline; Burbine, Andrew; Sturtevant, John; Clifford, Chris; Adam, Kostas; De Bisschop, Peter (2017) -
Modeling laser bandwidth for OPC applications
Zuniga, Christian; Adam, Kostas; Lam, Michael; Lalovic, Ivan; De Bisschop, Peter (2009) -
Physically-based compact models for fast lithography simulation
Lafferty, Neal; Adam, Kostas; Granik, Yuri; Torres, Andres; Maurer, Wilhelm (2005)