Browsing by author "Becker, Lucas"
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Epitaxial growth of active Si on top of SiGe etch stop layer in view of 3D device integration
Loo, Roger; Jourdain, Anne; Rengo, Gianluca; Porret, Clément; Hikavyy, Andriy; Liebens, Maarten; Becker, Lucas; Storck, Peter; Beyer, Gerald; Beyne, Eric (2020-09) -
Epitaxial growth of active Si on top of SiGe etch stop layer in view of 3D device integration
Loo, Roger; Jourdain, Anne; Rengo, Gianluca; Porret, Clément; Hikavyy, Andriy; Liebens, Maarten; Becker, Lucas; Storck, Peter; Beyer, Gerald; Beyne, Eric (2020-07)