Authors

Loo, Roger; Jourdain, Anne; Rengo, Gianluca; Porret, Clément; Hikavyy, Andriy; Liebens, Maarten; Becker, Lucas; Storck, Peter; Beyer, Gerald; Beyne, Eric

Conference

ECS 2020 Fall Meeting (PRiME): Symposium G01 Semiconductor Wfr Bonding; Science Technology and Applications 16

Title

Epitaxial growth of active Si on top of SiGe etch stop layer in view of 3D device integration

Publication type

Meeting abstract