Publication:
Epitaxial growth of active Si on top of SiGe etch stop layer in view of 3D device integration
Date
Loading...
Journal
Abstract
Description
Metrics
Views
1961 since deposited on 2021-10-29
Acq. date: 2025-10-23
Citations
Metrics
Views
1961 since deposited on 2021-10-29
Acq. date: 2025-10-23
Citations