Browsing by author "Fruhauf, S."
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Scaling down thickness of ULK materials for 65 node and below and its efect on electrical performance
Fruhauf, S.; Himcinschi, C.; Rennau, M.; Schulze, K.; Schulz, S.E.; Friedrich, M.; Gessner, T.; Zahn, D.R.T.; Le, Quoc Toan; Caluwaerts, Rudy (2005)