Browsing by author "Arvind, Shikhar"
Now showing items 1-3 of 3
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Actinic inspection of the EUV optical parameters of lithographic materials with lab-based radiometry and reflectometry
Dorney, Kevin; Kissoon, Nicola; Holzmeier, Fabian; Witting Larsen, Esben; Singh, Dhirendra; Arvind, Shikhar; Santra, Sayantani; Fallica, Roberto; Makhotkin, Igor; Philipsen, Vicky; De Gendt, Stefan; Fleischmann, Claudia; van der Heide, Paul; Petersen, John (2023-04-28) -
Impact of vacuum ultraviolet photons on ultrathin polymethylmethacrylate during plasma etching
Arvind, Shikhar; Witting Larsen, Esben; Bezard, Philippe; Petersen, John; De Gendt, Stefan (2024) -
Peak Broadening in Photoelectron Spectroscopy of Amorphous Polymers: The Leading Role of the Electrostatic Landscape
Galleni, Laura; Meulemans, Arne; Sajjadian, Faegheh; Singh, Dhirendra; Arvind, Shikhar; Dorney, Kevin; Conard, Thierry; D'Avino, Gabriele; Pourtois, Geoffrey; Escudero, Daniel; van Setten, Michiel (2024)