Browsing by author "Locke, Klaus"

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Elimination of HF-last cleaning related CoSi2 defects formation

Zou, Gang; Jonckx, Franky; Alves Donaton, Ricardo; Kuper, Werner; Maex, Karen; Mertens, Paul; Meuris, Marc; Heyns, Marc; Locke, Klaus; Korac, M.; Schild, R. (1994)
Marangoni drying: a new concept for drying silicon wafers

Schild, R.; Locke, Klaus; Kozak, M.; Heyns, Marc (1994)