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Elimination of HF-last cleaning related CoSi2 defects formation
Publication:
Elimination of HF-last cleaning related CoSi2 defects formation
Date
1994
Proceedings Paper
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Zou, Gang
;
Jonckx, Franky
;
Alves Donaton, Ricardo
;
Kuper, Werner
;
Maex, Karen
;
Mertens, Paul
;
Meuris, Marc
;
Heyns, Marc
;
Locke, Klaus
;
Korac, M.
;
Schild, R.
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2000
since deposited on 2021-09-29
Acq. date: 2025-10-23
Citations
Metrics
Views
2000
since deposited on 2021-09-29
Acq. date: 2025-10-23
Citations