Publication:

Elimination of HF-last cleaning related CoSi2 defects formation

Date

1994
Proceedings Paper
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Author(s)

Zou, Gang
;
Jonckx, Franky
;
Alves Donaton, Ricardo
;
Kuper, Werner
;
Maex, Karen  
;
Mertens, Paul  
;
Meuris, Marc  
;
Heyns, Marc  
;
Locke, Klaus
;
Korac, M.
;
Schild, R.

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2009 since deposited on 2021-09-29
3last month
Acq. date: 2026-04-25

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