Browsing by author "Mülders, Thomas"
Now showing items 1-3 of 3
-
Application of an inverse Mack model for negative tone development simulation
Gao, Weimin; Klostermann, Ulrich; Mülders, Thomas; Schmoeller, Thomas; Demmerle, Wolfgang; De Bisschop, Peter; Bekaert, Joost (2011) -
Calibration of physical resist models: methods, usability, and predictive power
Klostermann, Ulrich; Mülders, Thomas; Ponomarenco, Denis; Schmoeller, Thomas; Van de Kerkhove, Jeroen; De Bisschop, Peter (2009) -
Post-dicing particle control for 3D stacked IC integration flows
Bearda, Twan; Travaly, Youssef; Wostyn, Kurt; Halder, Sandip; Swinnen, Bart; Mülders, Thomas; Varghese, Ivan; Cheng, Paul (2009)