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Conference contributions
Post-dicing particle control for 3D stacked IC integration flows
Publication:
Post-dicing particle control for 3D stacked IC integration flows
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Date
2009
Proceedings Paper
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17963.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Bearda, Twan
;
Travaly, Youssef
;
Wostyn, Kurt
;
Halder, Sandip
;
Swinnen, Bart
;
Mülders, Thomas
;
Varghese, Ivan
;
Cheng, Paul
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1888
since deposited on 2021-10-17
Acq. date: 2025-12-11
Citations
Metrics
Views
1888
since deposited on 2021-10-17
Acq. date: 2025-12-11
Citations