Browsing by author "Kronmueller, S."
Now showing items 1-3 of 3
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A 10 μm thick poly-SiGe gyroscope processed above 0.35 μm CMOS
Scheurle, A.; Fuchs, T.; Kehr, K.; Leinenbach, C.; Kronmueller, S.; Arias, A.; Ceballos, J.; Lagos, M.A.; Mora, J.-M.; Munoz, J.M.; Ragel, A.; Ramos, J.; Van Aerde, Steven; Spengler, J.; Mehta, Anshu; Verbist, Agnes; Du Bois, Bert; Witvrouw, Ann (2007-01) -
Stable thin film encapsulation of acceleration sensors using polycrystalline silicon as sacrificial and encapsulation layer
Hoechst, A.; Scheuerer, R.; Stahl, H.; Fischer, F.; Metzger, L.; Reichenbach, R.; Laermer, F.; Kronmueller, S.; Watcham, S.; Rusu, Cristina; Witvrouw, Ann; Gunn, R. (2004) -
Thin film encapsulation of acceleration sensors using polysilicon sacrificial layers
Stahl, H.; Hoechst, A.; Fischer, F.; Metzger, L.; Reichenbach, R.; Laermer, F.; Kronmueller, S.; Breitschwerdt, K.; Gunn, R.; Watcham, S.; Rusu, Cristina; Witvrouw, Ann (2003)