Browsing by author "Aresti, Maitane"
Now showing items 1-2 of 2
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The influence of N containing plasmas on low-k films
Verdonck, Patrick; Aresti, Maitane; Ferchichi, Abdelkarim; Van Besien, Els; Stafford, Ben; Trompoukis, Christos; De Roest, David; Baklanov, Mikhaïl (2011) -
The influence of N containing plasmas on low-k films
Verdonck, Patrick; Aresti, Maitane; Ferchichi, Abdelkarim; Van Besien, Els; Stafford, Ben; De Roest, David; Baklanov, Mikhaïl (2010)