The influence of N containing plasmas on low-k films

No Thumbnail [100%x80]
View/open
Metadata
Show full item record
Authors
Verdonck, Patrick; Aresti, Maitane; Ferchichi, Abdelkarim; Van Besien, Els; Stafford, Ben; De Roest, David; Baklanov, Mikhaïl
Conference
Materials for Advanced Metalliization Conference - MAM
Title
The influence of N containing plasmas on low-k films
Publication type
Oral presentation
Embargo date
9999-12-31
Collections