The influence of N containing plasmas on low-k films

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Authors

Verdonck, Patrick; Aresti, Maitane; Ferchichi, Abdelkarim; Van Besien, Els; Stafford, Ben; Trompoukis, Christos; De Roest, David; Baklanov, Mikhaïl

ISSN

0167-9317

Issue

5

Journal

Microelectronic Engineering

Volume

88

Title

The influence of N containing plasmas on low-k films

Publication type

Journal article

Embargo date

9999-12-31

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